MEMS Motion Sensing Accelerometers

KXPS5 SERIES

Tri-axis, 1.5g - 6g, Digital (I²C or SPI) and Analog Outputs, 3x5x0.9mm LGA: These high-performance silicon micromachined linear accelerometers and inclinometers consist of a sensor element and an ASIC packaged in a 3x5x0.9mm Land Grid Array (LGA). The sensor element is fabricated from single-crystal silicon with proprietary Deep Reactive Ion Etching (DRIE) processes and is protected from the environment by a hermetically-sealed silicon cap at the wafer level.; The KXPS5 series is designed to provide a high signal-to-noise ratio with excellent performance over temperature. These sensors can accept supply voltages between 1.8V and 5.25V. Sensitivity is factory programmable allowing customization for applications requiring from ±1.5g to ±6.0g ranges. Sensor bandwidth is user-definable. Interrupts can be generated for acceleration on any axis above a threshold value (Motion Interrupt) or for acceleration on all three axes below a threshold value (Free-fall Interrupt).; The sensor element functions on the principle of differential capacitance. Acceleration causes displacement of a silicon structure resulting in a change in capacitance. An ASIC, using a standard CMOS manufacturing process, detects and transforms changes in capacitance into an analog output voltage, which is proportional to acceleration. This voltage is digitized by an on-board A/D converter and is accessed via an inter-integrated circuit (I²C) bus or serial peripheral interface (SPI).

Product	Range(g)	Sensitivity	Offset	Operating Voltage(V)	Output	Temperature(°C)	Package
KXPS5-1050	2	560 (mV/g)	1.40 V	2.8	I²C, SPI, Analog	-40 to +85	3x5x0.9 LGA
KXPS5-2050	2	660 (mV/g)	1.65 V	3.3	I²C, SPI, Analog	-40 to +85	3x5x0.9 LGA
KXPS5-3157	3	440 (mV/g)	1.65 V	3.3	I²C, SPI, Analog	-40 to +85	3x5x0.9 LGA
KXPS5-4457	3	240 (mV/g)	0.90 V	1.8	I²C, SPI, Analog	-20 to +70	3x5x0.9 LGA