Tri-axis, 1.0g - 5g, Multiplexed Analog
and Digital (SPI), 5x5x1.2mm DFN
These high-performance silicon micromachined linear accelerometers
and inclinometers consist of a sensor element and an ASIC packaged
in a 5x5x1.2mm Dual Flat No-lead (DFN). The sensor element is fabricated
from single-crystal silicon with proprietary Deep Reactive Ion Etching
(DRIE) processes, and is protected from the environment by a hermetically-sealed
silicon cap at the wafer level.
The KXR94 series is designed to provide a high signal-to-noise
ratio with excellent performance over temperature. These sensors
can accept supply voltages between 2.5V and 5.25V. Sensitivity is
factory programmable allowing customization for applications requiring
from ±1.0g to ±5.0g ranges. Sensor bandwidth is user-definable.
The sensor element functions on the principle of differential
capacitance. Acceleration causes displacement of a silicon structure
resulting in a change in capacitance. An ASIC, using a standard
CMOS manufacturing process, detects and transforms changes in capacitance
into an analog output voltage, which is proportional to acceleration.
This voltage is digitized by an on-board A/D converter and is accessed
via serial peripheral interface (SPI). The sense element design
utilizes common mode cancellation to decrease errors from process
variation and environmental stress.
