KXR94 SERIES
Tri-axis, 1.0g - 4g, Multiplexed Analog and Digital (SPI), 5x5x1.2mm DFN
The KXR94 series of linear accelerometers and inclinometers is designed to provide a high signal-to-noise ratio with excellent performance over temperature. These sensors can accept supply voltages between 2.5V and 5.25V. Sensitivity is factory programmable, allowing customization for applications requiring from ±1g to ±4g ranges. Sensor bandwidth is user-definable.
These high-performance silicon-micromachined sensors consist of a sensor element and an ASIC packaged in a 5x5x1.2mm Dual Flat No-lead (DFN). The sensor element is fabricated from single-crystal silicon with proprietary Deep Reactive Ion Etching (DRIE) processes and is protected from the environment by a hermetically-sealed silicon cap at the wafer level.
The sensor element functions on the principle of differential capacitance. Acceleration causes displacement of a silicon structure resulting in a change in capacitance. An ASIC, using a standard CMOS manufacturing process, detects and transforms changes in capacitance into an analog output voltage, which is proportional to acceleration. This voltage is digitized by an on-board A/D converter and is accessed via serial peripheral interface (SPI). The sense element design utilizes common mode cancellation to decrease errors from process variation and environmental stress.
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| PART NUMBER | ORDER | RANGE(G) | SENSITIVITY |
OFFSET | OPERATING VOLTAGE (V) |
OUTPUT | TEMPERATURE (°C) |
PACKAGE |
|---|---|---|---|---|---|---|---|---|
| KXR94-1050 |  |
±2 | 560 (mV/g) | 1.4 (V) | 2.8 | Mux Analog | -40 to +85 | 5x5x1.2 DFN |
| KXR94-2050 | |
±2 | 660 (mV/g) | 1.65 (V) | 3.3 | Mux Analog | -40 to +85 | 5x5x1.2 DFN |
| KXR94-2283 | |
±2 | 1000 (mV/g) | 2.5 (V) | 5.0 | Mux Analog | -40 to +85 | 5x5x1.2 DFN |
| KXR94-2353 | |
±2 | 819 (counts/g) | 2048 (counts) | 3.3 | Digital SPI | -40 to +85 | 5x5x1.2 DFN |
| KXR94-7050 |  |
±2 | 660 (mV/g) | 1.65 (V) | 3.3 | Mux Analog | -40 to +125 | 5x5x1.2 DFN |
| PART NUMBER | ORDER | DESCRIPTION | AXIS(ES) OF SENSITIVITY | RANGE | SENSITIVITY | OPERATING VOLTAGE (V) |
TEMPERATURE (°C) |
DOCUMENTATION | |
|---|---|---|---|---|---|---|---|---|---|
| EVAL-KXR94-1050 | |
KXR94-1050 Evaluation Board | Tri XYZ | ±2 | 560 (mV/g) | 1.4 (V) | 2.8 | -40 to +85 | Board Layout Board Schematic |
| EVAL-KXR94-2050 | |
KXR94-2050 Evaluation Board | Tri XYZ | ±2 | 660 (mV/g) | 1.65 (V) | 3.3 | -40 to +85 | Board Layout Board Schematic |
| EVAL-KXR94-2283 | |
KXR94-2283 Evaluation Board | Tri XYZ | ±2 | 1000 (mV/g) | 2.5 (V) | 5.0 | -40 to +85 | Board Layout Board Schematic |
| EVAL-KXR94-2353 | |
KXR94-2353 Evaluation Board | Tri XYZ | ±2 | 819 (counts/g) | 2048 (counts) | 3.3 | -40 to +85 | Board Layout Board Schematic |
| EVAL-KXR94-7050 | |
KXR94-7050 Evaluation Board | Tri XYZ | ±2 | 660 (mV/g) | 1.65 (V) | 3.3 | -40 to +125 | Board Layout Board Schematic |
| PART NUMBER | ORDER | DESCRIPTION | AXIS(ES) OF SENSITIVITY | DESCRIPTION | DOCUMENTATION |
|---|---|---|---|---|---|
| USBDEVKIT | |
Kionix Application Firmware Development Kit |
Tri XYZ | These kits are suitable currently for all 3.3v accelerometers. Customers must specify which accelerometer product is preferred. |
Features
Guide |
