MEMS Accelerometers - KXSD9 Series

KXSD9 SERIES

Tri-Axis, 2g, 4g, 6g, 8g, User Selectable, Ultra Low Power Digital, 3x3x0.9mm LGA: These high-performance silicon micromachined linear accelerometers and inclinometers consist of a sensor element and an ASIC packaged in a 3x3x0.9mm Land Grid Array Dual (LGA). The sensor element is fabricated from single-crystal silicon with proprietary Deep Reactive Ion Etching (DRIE) processes, and is protected from the environment by a hermetically-sealed silicon cap at the wafer level.; The KXSD9 series is designed to provide flexibility. These sensors can accept supply voltages between 1.8V and 3.6V. Sensitivity is user selectable at 2g, 4g, 6g, and 8g. Several user-programmable internal low pass filters eliminate the need for external filter capacitors. The auxillary input provides access to the embedded A/D converter.; The sensor element functions on the principle of differential capacitance. Acceleration causes displacement of a silicon structure resulting in a change in capacitance. An ASIC, using a standard CMOS manufacturing process, detects and transforms changes in capacitance into an analog output voltage, which is proportional to acceleration. This voltage is digitized by an on-board A/D converter and is accessed via serial peripheral interface (SPI). The sense element design utilizes common mode cancellation to decrease errors from process variation and environmental stress.