Company Profile

Kionix, Inc., originally founded in 1993, is a global MEMS accelerometer manufacturer based in Ithaca, NY, USA. Kionix utilizes a deep-silicon, proprietary MEMS technology known as plasma micromachining for its high-volume production. As such, the Company holds an extensive portfolio of licensed and internally-developed intellectual property. Kionix was acquired by ROHM Co., Ltd. of Japan on November 16, 2009.

Background of Kionix acquisition by ROHM

ROHM's wide variety of product development capabilities, global production and logistics system, customer sales and technical support network, and strong financial base will enable ROHM to further enhance the superiority of Kionix accelerometers in the market. In the rapidly expanding MEMS accelerometer market, ROHM will accelerate its growth as a world-leading semiconductor company by acquiring the outstanding fundamental technologies and product lineup of Kionix, a pioneer.

Kionix Technology

Kionix Technology is defined by the proprietary plasma micromachining process and the technology to hermetically seal at a wafer level by bonding the silicon lid wafer to the device wafer. The sense element that detects acceleration consists of a fixed electrode, a movable electrode, and a spring. These structures are formed on the silicon device wafer using ROHM’s proprietary plasma micromachining process which allows deep and high precision etching. Using advanced technology, the lid wafer is hermetically sealed to the device wafer with these formed structures resulting in the completion of the sense element. ROHM electrostatic capacitive MEMS are manufactured using Kionix Technology and delivers outstanding performance.


Please kindly note that product information has been transferred from this website to the official website of ROHM. Information published on each website is as follows.

Accelerometer ICs Page:



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