MEMS Motion Sensing Accelerometers

KXD94 SERIES

Tri-axis, 5g - 15g, Low Power Analog, 5x5x1.2mm DFN: These high-performance silicon micromachined linear accelerometers and inclinometers consist of a sensor element and an ASIC packaged in a 5x5x1.2mm Dual Flat No-lead (DFN). The sensor element is fabricated from single-crystal silicon with proprietary Deep Reactive Ion Etching (DRIE) processes, and is protected from the environment by a hermetically-sealed silicon cap at the wafer level.; The KXD94 series is designed to provide a high signal-to-noise ratio with excellent performance over temperature. These sensors can accept supply voltages between 2.75 - 5.25V. Sensitivity is factory programmable for applications requiring from ±5.0g to ±15.0g ranges. Sensor bandwidth is user-definable.; The sensor element functions on the principle of differential capacitance. Acceleration causes displacement of a silicon structure resulting in a change in capacitance. An ASIC, using a standard CMOS manufacturing process, detects and transforms changes in capacitance into an analog output voltage, which is proportional to acceleration. The sense element design utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress.

Product	Range(g)	Sensitivity	Offset	Operating Voltage(V)	Output	Temperature(°C)	Package
KXD94-2802	10	200 (mV/g)	2.5 V	5.0	Mux Analog	-40 to +85	5x5x1.2 DFN
KXD94-7044	13	150 (mV/g)	2.5 V	5.0	Mux Analog	-40 to +125	5x5x1.2 DFN
KXD94-7138	5	400 (mV/g)	2.5 V	5.0	Mux Analog	-40 to +125	5x5x1.2 DFN
KXD94-7228	13	150 (mV/g)	2.5 V	5.0	Mux Analog	-40 to +125	5x5x1.2 DFN