KXD94 SERIES

Tri-axis, 5g - 15g, Low Power Analog, 5x5x1.2mm DFN

The KXD94 series of linear accelerometers and inclinometers is designed to provide a high signal-to-noise ratio with excellent performance over temperature.  These sensors can accept supply voltages between 2.5 - 5.25V.  Sensitivity is factory programmable, for applications requiring from ±5g to ±15g ranges.  Sensor bandwidth is user-definable.

These high-performance silicon-micromachined sensors consist of a sensor element and an ASIC packaged in a 5x5x1.2mm Dual Flat No-lead (DFN). The sensor element is fabricated from single-crystal silicon with proprietary Deep Reactive Ion Etching (DRIE) processes and is protected from the environment by a hermetically-sealed silicon cap at the wafer level.

The sensor element functions on the principle of differential capacitance. Acceleration causes displacement of a silicon structure resulting in a change in capacitance. An ASIC, using a standard CMOS manufacturing process, detects and transforms changes in capacitance into an analog output voltage, which is proportional to acceleration. The sense element design utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress.

PRODUCT SUMMARY
  KXD94 Product Series

PRODUCT SPECIFICATIONS
   Select the product below KXD94-2802 KXD94-7138 KXD94-7228